Publication details

X-ray scattering study of oxide precipitates in Cz-Si

Authors

CAHA Ondřej MEDUŇA Mojmír BERNATOVÁ Silvie RŮŽIČKA Jiří MIKULÍK Petr BURŠÍK Jiří SVOBODA Milan BERNSTORFF S.

Year of publication 2010
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description Two x-ray diffraction methods were used for characterization of the oxide precipitates in Czochralski silicon series of samples. The maping of the diffuse scattering around reciprocal lattice point in Bragg geometry and the simultaneous measurement of the diffracted and transmitted beam intensity in the Laue diffraction geometry.
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