Publication details

Deposition and analyses of hard and thick well adherent nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD process

Authors

SOUČEK Pavel SCHMIDTOVÁ Tereza ZÁBRANSKÝ Lukáš BURŠÍKOVÁ Vilma VAŠINA Petr JÍLEK Mojmír EL MEL Abdelaziz TESSIER Pierre-Yves SCHÄFER Jan BURŠÍK Jiří

Year of publication 2011
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description Deposition and analyses of hard and thick well adherent nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD process. Severeal micrometers thick coatings with hardness over 45 GPa and Young's modulus over 400 GPa was reached.
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