Publication details
Deposition and analyses of hard and thick well adherent nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD process
| Authors | |
|---|---|
| Year of publication | 2011 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | Deposition and analyses of hard and thick well adherent nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD process. Severeal micrometers thick coatings with hardness over 45 GPa and Young's modulus over 400 GPa was reached. |
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