Higher harmonic frequencies in capacitive discharges and their using for monitoring of plasma processing

• Authors: DVOŘÁK Pavel; BURŠÍKOVÁ Vilma; ŽEMLIČKA Radek
• Year of publication: 2011
• Type: Conference abstract
• MU Faculty or unit: Faculty of Science
• Description: Waveforms of discharge voltage and current and their changes induced by changes of plasma parameters (namely during deposition processes) were studied.

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