prof. Mgr. Petr Vašina, Ph.D.
ředitel ústavu – Ústav fyziky a technologií plazmatu
kancelář: pav. 06/01025
Kotlářská 267/2
611 37 Brno
telefon: | 549 49 6479 |
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sociální a akademické sítě: |
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Počet publikací: 381
2008
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Evolution of N and O atom densities for oxygen admixture added into nitrogen afterglow
Book of Extended Abstracts of 2nd Central European Symposium on Plasma Chemistry, rok: 2008
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Harmonic analysis of discharge voltages as a tool to control RF sputtering deposition process
19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts, rok: 2008
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High power pulsed microvawe discharge: theory and experiment
Book of Extended Abstracts of 2nd Central European Symposium on Plasma Chemistry, rok: 2008
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Influence of N2 and CH4 on deposition rate of boron based thin films prepared by magnetron sputtering
Book of Extended Abstracts of 2nd Central European Symposium on Plasma Chemistry, rok: 2008
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Influence of N2 and CH4 on depositon rate of boron based thin films prepared by magnetron sputtering
Chemické listy, rok: 2008, ročník: 102, vydání: 1
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Ionization Processes and Plasma Chemistry in Pulsed RF Glow Discharge TOF Mass Spectroscopy for Thin Film Depth Profile Analyses
Book of Abstracts, Second Central European Symposium on Plasma Chemistry, rok: 2008
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Limits for H, N, O and O2 Detection by Means of Electron Paramagnetic Resonance
19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts, rok: 2008
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Measurement of Fundamental and Higher Harmonic Frequencies as Tool to Control RF Sputtering Deposition Process
Programme and Abstract Book of the 23rd Symposium on Plasma Physics and Technology, rok: 2008
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Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process
19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts, rok: 2008
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Modeling of reactive sputtering process with non-linear discharge current density
Book of Extended Abstracts of 2nd Central European Symposium on Plasma Chemistry, rok: 2008