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Optical emission spectroscopy of RF plasma jet in neon/argon Penning mixture at atmospheric pressure

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DOSOUDILOVÁ Lenka ŠPERKA Jiří SCHÄFER Jan HARHAUSEN Jens PETERS Sebastian NAVRÁTIL Zdeněk FOEST Rüdiger

Rok publikování 2014
Druh Konferenční abstrakty
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
Popis A radio-frequency (RF, 27.12 MHz) capillary atmospheric pressure plasma jet in neon/argon Penning gas mixture (0 % - 3 % admixture of argon) was investigated by optical emission spectroscopy. The miniaturized plasma jets have been found advantageous in a materials processing applications such as surface cleaning, surface activation, film deposition and sterilisation. One of the main advantages of these plasma sources is the possibility of localized and 3D treatment. In this work, the emission spectra were recorded in order to obtain information about the effect of quenching of neon excited atoms by argon with the increase of argon admixture. Further, the BOLSIG+ solver was used to calculate the electron mean energy and the rate coefficients for direct excitation of neon and argon levels for different Ne/Ar gas mixtures. The estimate of the reduced electric field strength according to these results was made.
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