Spectroscopic investigations of plasma nitriding processes using an active screen made of carbon in a model reactor

• Autoři: PUTH Alexander; HAMANN Stephan; KUSÝN Lukáš; BURLACOV Igor; DALKE Anke; SPIES Heinz-Joachim; BIERMANN Horst; RÖPCKE Jürgen
• Rok publikování: 2018
• Druh: Konferenční abstrakty
• Fakulta / Pracoviště MU: Přírodovědecká fakulta
• Popis: H2-N2-plasmas were investigated spectroscopically in an active screen nitriding reactor to study the usage of a carbon screen without any additional gaseous carbon precursor.