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Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry

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VOHÁNKA Jiří ŠUSTEK Štěpán BURŠÍKOVÁ Vilma ŠKLÍBOVÁ Veronika ŠULC Václav HOMOLA Vojtěch FRANTA Daniel ČERMÁK Martin OHLÍDAL Miloslav OHLÍDAL Ivan

Rok publikování 2020
Druh Článek v odborném periodiku
Časopis / Zdroj Applied Surface Science
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
www https://doi.org/10.1016/j.apsusc.2020.147625
Doi http://dx.doi.org/10.1016/j.apsusc.2020.147625
Klíčová slova Thickness non-uniformity; Ellipsometry; Imaging spectroscopic reflectometry
Popis The effects of thickness non-uniformity on measured optical quantities must be often considered in the optical characterization. The effects of thickness non-uniformity can be taken into account by averaging the Mueller matrices over the distribution of local thicknesses within the measured area. The distribution of local thicknesses can be assumed in a certain form (e.g. the uniform distribution), or it can be derived on the basis of a model assuming a certain shape of thickness non-uniformity. The latter approach is especially useful for the variable-angle spectroscopic ellipsometry since it can take into account dependence on the incidence angle due to the changes in the size of the light spot. This paper presents results of the optical characterization of three polymer-like thin films highly non-uniform in thickness using variable-angle spectroscopic ellipsometry. The shapes of the thickness non-uniform films are determined on the basis of a model assuming local thicknesses given by quadratic polynomials in coordinates along the surfaces of the films. The studied areas on the films were also measured by the imaging spectroscopic reflectometry, which provides a more direct method to determine local thicknesses. The results achieved using the imaging spectroscopic reflectometry and variable-angle spectroscopic ellipsometry were then compared.
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