Informace o publikaci
Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions
| Autoři | |
|---|---|
| Rok publikování | 1998 |
| Druh | Článek ve sborníku |
| Konference | 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma |
| Fakulta / Pracoviště MU | |
| Citace | |
| Obor | Fyzika plazmatu a výboje v plynech |
| Klíčová slova | mechanical properties; thin Films; PECVD |
| Popis | Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions |