Informace o publikaci
Diagnostics of surfatron-generated plasma by probe measurements and emission spectroscopy
| Autoři | |
|---|---|
| Rok publikování | 2004 |
| Druh | Článek v odborném periodiku |
| Časopis / Zdroj | Czech. J. Phys. |
| Fakulta / Pracoviště MU | |
| Citace | |
| Obor | Fyzika plazmatu a výboje v plynech |
| Klíčová slova | microwave plasma; surfatron; probe diagnostics; optical emission spectroscopy |
| Popis | Applications of plasma sources in technology, medicine and biomedicine are already known for a long time. Our work is focused on diagnostics and applications of a microwave plasma source in these areas. The diagnosed microwave-driven plasma source consists of a surfatron powered by a microwave magnetron generator, working at 2.45 GHz in the output power range (0 - 300) W, which creates plasma from the working gas flowing through the quartz nozzle. We present results of diagnostics of generated plasma at nozzle exit at different experimental conditions: variable absorbed power, total chamber pressure etc. The diagnostics of plasma column was performed by means of double Langmuir probe measurement and optical emission spectroscopy. |
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