Publication details
Využití hydridního PVD-PECVD procesu pro růst TiCC II vrstev na zařízení s rotačními katodami
Title in English | Employing hybrid PVD-PECVD process with rotating cylindrical magnetron to grow TiCC II coatings |
---|---|
Authors | |
Year of publication | 2014 |
MU Faculty or unit | |
Description | Technology development of lubricant TiCC II coatings using device with rotating cathodes of Platit a.s. company |