Mechanical and optical properties of silicon oxide protective coatings prepared by PECVD

• Authors: ZAJÍČKOVÁ Lenka; BURŠÍKOVÁ Vilma; JANČA Jan
• Year of publication: 1997
• Type: Article in Proceedings
• Conference: Juniormat
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics

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• Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates