Publication details

Determination of Zr and Ti in 3-micrometers-thick ZrTiN ceramic coatings using laser ablation inductively coupled plasma atomic emission spectrometry

Authors

KANICKÝ Viktor MUSIL Jan MERMET Jean - Michel

Year of publication 1997
Type Article in Periodical
Magazine / Source Applied Spectroscopy
MU Faculty or unit

Faculty of Science

Citation
Field Analytic chemistry
Keywords Atomic emission spectrometry; inductively coupled plasma; UV laser ablation; Coating analysis; Nitride ceramic coatings
Description Analysis of 3-mu m-thick ZrN, TIN, and ZrTiN ceramic coatings on a high-speed steel substrate by laser ablation inductively coupled plasma atomic emission spectrometry (LA-ICP-AES) is described, A Nd:YAG laser was used in the Q-switched mode and operated at 355 nm and 5 mJ, Ablation patterns were obtained on the target surface by moving the ablation chamber with respect to the laser beam by means of an X-Y translator, Control of the depth of penetration was obtained by successively performing a limited number of cycles. Transient signals were obtained and their peak areas were used for the construction of calibration graphs based on the concentrations determined by energy-dispersive X-ray (EDX) analysis, An erosion rate of 0.1 mu m per cycle was observed, Crater shape and depth, temporal behavior, and reproducibility of the signals are described.

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