Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD

• Authors: BURŠÍKOVÁ Vilma; NAVRÁTIL Vladislav; ZAJÍČKOVÁ Lenka; JANČA Jan
• Year of publication: 2002
• Type: Article in Periodical
• Magazine / Source: Materials Science and Engineering A
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: Temperature dependence; mechanical properties; DLC; PECVD
• Description: The mechanical properties of hard protective DLC/Si films deposited by PECVD from Ar-CH4-HMDSO mixture have been analyzed using microindentation techniques as the main characterisation tool. The formation and development of crack lines and patterns have been studied to determine fracture toughness of the film and of the interface as a function of temperature.

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