Rf sputtering of composite SiOx/plasma polymer films and their basic properties

• Authors: CHOUKOUROV A.; PIHOSH Y.; STELMASHUK V.; BIEDERMAN Hynek; SLAVÍNSKÁ D.; KORMUNDA M.; ZAJÍČKOVÁ Lenka
• Year of publication: 2002
• Type: Article in Periodical
• Magazine / Source: Surface & coatings technology
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: Rf magnetron; sputtering; SiOx; plasma polymer films
• Description: Rf sputtering of composite SiOx/plasma polymer films and their basic properties

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