Deposition of thin organosilicon polymer films in atmospheric pressure glow discharge

• Authors: NAVRÁTIL Zdeněk; ZAJÍČKOVÁ Lenka; SŤAHEL Pavel; BURŠÍKOVÁ Vilma; ČECH Jan; KUČEROVÁ Zuzana; TRUNEC David
• Year of publication: 2003
• Type: Article in Proceedings
• Conference: Proceedings of 16th ISPC
• MU Faculty or unit: Faculty of Informatics
• Field: Plasma physics
• Keywords: Deposition; thin organosilicon polymer films; atmospheric pressure; glow discharge
• Description: Deposition of thin organosilicon polymer films in atmospheric pressure glow discharge

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