Film deposition in Parallel Plate RF Discharges Containing Hydrocarbons

• Authors: BIBINOV Nikita; KUDRLE Vít; ZAJÍČKOVÁ Lenka; DONKO Zoltan; WIESEMANN Klaus
• Year of publication: 2003
• Type: Article in Proceedings
• Conference: Proceedings of ISPC 14
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: PECVD; negative ions; acethylene
• Description: Film deposition in Paralle Plate RF Discharges Containing Hydrocarbons

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