Thermal stability of diamond like carbon thin films prepared using plasma enhanced chemical vapor deposition

• Authors: ZŮDA Jaroslav; BURŠÍKOVÁ Vilma; ČECH Jan; SŤAHEL Pavel
• Year of publication: 2005
• Type: Article in Proceedings
• Conference: JUNIORMAT'05
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: Thermal stability; diamond like carbon; thin films; plasma enhanced chemical vapor deposition
• Description: In this work the thermal stability of diamond like carbon thin films prepared using plasma enhanced chemical vapor deposition was studied.

Related projects

• Plasmachemical modification of natural polymers based on cellulose in atmospheric pressure surface or coplanar barrier discharge
• Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
• Multiscale approach to relationships between mechanical and microstructural characteristics of materials