Efficient excimer source in rare gases/chlorine mixtures

• Authors: BRABLEC Antonín; GUIVAN N. N.; SŤAHEL Pavel
• Year of publication: 2006
• Type: Article in Proceedings
• Conference: 7th International Balkan Workshop on Applied Physics - Abstracts
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: Surface Barrier Discharge; Excimer mixtures
• Description: Parameters of efficient source of excimer radiation generated in rare gases/chlorine mixtures are investigated by OES.

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