Publication details
Fast hydrogen ions in capacitively coupled discharge
| Authors | |
|---|---|
| Year of publication | 2006 |
| Type | Article in Proceedings |
| Conference | Abstracts of Invited Lectures and Contributed Papers of 18th Europhysics Conference on the Atomic and Molecular Physics of Ionised Gases |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | IED hydrogen plasma ions |
| Description | Fast hydrogen ions H+ were detected in a hydrogen capacitively coupled discharge. Their creation was explained by a dissociative ionization of the H2 molecules by electron impact via the repulsive 2Sigma u+ state of the H2+. This process requires high-energy electrons. By means of Langmuir probe measurements it was shown, that the high-energy electrons are present at low pressure in the discharge. |
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