Publication details
Mass spectrometry of diffuse coplanar surface barrier discharge
| Authors | |
|---|---|
| Year of publication | 2008 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | In this paper we present some of the results obtained in non-equilibrium low- temperature diffuse coplanar surface barrier discharge by using Molecular Beam Mass Spec- trometer. In order to understand the process of treatment by this type of plasma, knowledge of the composition of plasma, i.e. of the active species, is needed. In this work we present mass spectrometric studies on chemical products and active species in the plasma generated by the DCSBD at atmospheric pressure in the ambient air. Neutral chemistry and nitric oxide production are discussed. |
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