Diagnostics of microwave discharge for surface modification

• Authors: HNILICA Jaroslav; KUDRLE Vít
• Year of publication: 2010
• Type: Article in Proceedings
• Conference: Potential and Applications of Thin Ceramic and Metal Coatings
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: mikrovlnný výboj - surfatron - modifikace povrchů
• Description: Microwave plasmas under atmospheric pressure present considerable interest for wide range of applications, such as air pollution control, surface treatment, or plasma synthesis. We use standard industrial surfatron for produce argon microwave plasma under atmospheric pressure. Diagnostics of this plasma under different conditions can help us to choose the best condition for surface modification.

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