Deposition and characterization of n-TiC/a-C:H coatings prepared by hybrid PVD-PECVD

• Authors: SOUČEK Pavel; ABDELAZIZ El Mel; PIERRE-YVES Tessier; ELIÁŠ Marek; BURŠÍKOVÁ Vilma; VAŠINA Petr
• Year of publication: 2010
• Type: Conference abstract
• MU Faculty or unit: Faculty of Science
• Description: Deposition and characterization of n-TiC/a-C:H coatings prepared by hybrid PVD-PECVD. Analyses of mechanical properties, chemical composition and adhesion.

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