Morphological study of nanocrystalline TiC/a-C:H composites deposited by hybrid PVD-PECVD process

• Authors: VAŠINA Petr; SOUČEK Pavel; SCHMIDTOVÁ Tereza; BURŠÍKOVÁ Vilma; SCHÄFER Jan
• Year of publication: 2011
• Type: Conference abstract
• MU Faculty or unit: Faculty of Science
• Description: This paper presents the morphological study of nanocrystalline TiC/a-C:H composites deposited by hybrid PVD-PECVD process.

Related projects

• Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
• Plazmochemické procesy a jejich technologické aplikace
• CEPLANT - Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy