Publication details

Higher harmonic frequencies in capacitive discharges and their using for monitoring of plasma processing

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Authors

DVOŘÁK Pavel BURŠÍKOVÁ Vilma ŽEMLIČKA Radek

Year of publication 2011
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description Waveforms of discharge voltage and current and their changes induced by changes of plasma parameters (namely during deposition processes) were studied.
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