Publication details
Development of reference materials for the investigation of local mechanical properties at the nanoscale
| Authors | |
|---|---|
| Year of publication | 2012 |
| Type | Article in Periodical |
| Magazine / Source | Surface and Interface Analysis |
| MU Faculty or unit | |
| Citation | |
| Web | http://onlinelibrary.wiley.com/doi/10.1002/sia.4850/pdf |
| Doi | http://dx.doi.org/10.1002/sia.4850 |
| Field | Plasma physics |
| Keywords | local mechanical properties; nanoindentation; reference materials |
| Description | In this contribution, we present the results of our effort on preparing and testing thin film–based reference materials prepared using plasma technologies. We describe a deposition procedure that allows us to produce samples with a large range of hardness and modulus values. From these, we choose a very soft but stable sample that is then further tested to verify its suitability as a reference sample. The major issues discussed in this article are the repeatability of the deposition process, time stability, and homogeneity. |
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