Mgr. Tereza Schmidtová, Ph.D.
Researcher I, Department of Plasma Physics and Technology
Office: pav. 06/04021
Kotlářská 267/2
611 37 Brno
Phone: | +420 549 49 2589 |
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E‑mail: |
Total number of publications: 52
2009
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Modeling of reactive magnetron sputtering deposition process - different target utilization, situation when O2 and H2 are added simultaneously
Year: 2009, type: Conference abstract
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Modelling of surface processes taking place during reactive magnetron sputtering deposition process with simultaneous adding of hydrogen and oxygen
Book of Abstracts, Frontiers in Low Temperature Plasma Diagnostics 8, year: 2009
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Modelling of the reactive sputtering process with non-uniform discharge current density and different temperature conditions
Plasma Sources Science and Technology, year: 2009, volume: 18, edition: 2
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Pressure Effect on the Velocity and Flux Distributions of Sputtered Metal Species in Magnetron Discharge Measured by Space-Resolved Tunable Diode Laser Induced Fluorescence
Plasma processes and polymers, year: 2009, volume: 6/2009, edition: Issue S1
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Reactive magnetron sputtering - modelling of different target utilization in metallic and compound mode and situation when oxygen and hydrogen are added simultaneously
Year: 2009, type: Conference abstract
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Suppressed hysteresis behaviour of titanium sputtering in acetylene gas.
Year: 2009, type: Conference abstract
2008
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Advanced modeling of reactive sputtering process with non-linear discharge current density
Chemické Listy, year: 2008, volume: 102, edition: 1
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Ionization Processes and Plasma Chemistry in Pulsed RF Glow Discharge TOF Mass Spectroscopy for Thin Film Depth Profile Analyses
Book of Abstracts, Second Central European Symposium on Plasma Chemistry, year: 2008
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Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process
19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts, year: 2008
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Modeling of reactive sputtering process with non-linear discharge current density
Book of Extended Abstracts of 2nd Central European Symposium on Plasma Chemistry, year: 2008