Publication details
Probe measurements in capacitively coupled rf discharge
| Authors | |
|---|---|
| Year of publication | 2001 |
| Type | Article in Proceedings |
| Conference | WDS'01, Proceedings of contributed papers, Part II, Physics of Plasmas and Ionized Media |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | capacitevely coupled r.f. discharge; Langmuir probe |
| Description | The current-voltage characteristics were measured by r.f. compensated Langmuir probe in capacitevely coupled r.f. discharges. Two different gases, argon and nitrogen, were used. From I-V curves were taken main parameters as a plasma and floating potentials, electron temperatures, electron concentration, and mean electron energy and their dependence on input power over the range from 5 to 40 W, distance between electrodes and probe position in radial axe in gas pressure between 0.43 and 4.3 Pa. |
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