Experimental study of a pre-ionized high power pulsed magnetron discharge

• Authors: VAŠINA Petr; MEŠKO Marcel; IMBERT Jean-Christophe; GANCIU Mihai; BOISSE-LAPORTE Caroline; DE POUCQUES Ludovic; TOUZEAU Michel; PAGNON Daniel; BRETAGNE Jean
• Year of publication: 2007
• Type: Article in Periodical
• Magazine / Source: Plasma Sources Science and Technology
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: magnetron; sputtering; high power pulses
• Description: The paper study high power impulse magnetron plasma by means of time reselved optical emision spectroscopy and electrical measurements.

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