Behaviour of Hybrid PVD-PECVD in Comparison with Conventional Reactive Magnetron Sputtering.

• Authors: SCHMIDTOVÁ Tereza; VAŠINA Petr
• Year of publication: 2010
• Type: Conference abstract
• MU Faculty or unit: Faculty of Science
• Description: Behaviour of Hybrid PVD-PECVD Process in Comparison with Conventional Reactive Magnetron Sputtering. Modelling of hybrid PVD-PECVd process.

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