Publication details
Homogeneous and heterogeneous nucleation of oxygen in Si-CZ
| Authors | |
|---|---|
| Year of publication | 2011 |
| Type | Article in Periodical |
| Magazine / Source | Solid State Phenomena |
| MU Faculty or unit | |
| Citation | |
| Field | Solid matter physics and magnetism |
| Keywords | Interstitials; Nucleation; Precipitation; Silicon; Vacancies |
| Description | We present numerical simulations of nucleation kinetics of vacancies and interstitials during RTA and we study the impact of annealing temperature on bulk micro defect concentration. |
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