Depozice a charakterizace organosilikonových tenkých vrstev ze směsi TEOS+O2

• Title in English: Deposition and characterization of organosilicon thin films from TEOS + O2 gas mixture
• Authors: JANČA Jan; NAVRÁTIL Karel; BOCHNÍČEK Zdeněk; PEŘINA V.
• Year of publication: 1995
• Type: Article in Periodical
• Magazine / Source: Czechoslovak Journal of Physics
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics

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