Structural characterization of reactive ion-etched semicond uctor nanostructures using x-ray reciprocal space mapping

• Authors: BAUER G.; DARHUBER A.; HOLÝ Václav
• Year of publication: 1996
• Type: Article in Periodical
• Magazine / Source: Mat. Res. Soc. Symp. Proc.
• MU Faculty or unit: Faculty of Science
• Field: Solid matter physics and magnetism

Related projects

• Physical properties of new materials and layered structures