Publication details
Atmospheric plasma as a source of chemically active species for low-temperature processing of materials
| Authors | |
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| Year of publication | 2022 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | Multi-hollow surface dielectric barrier discharge (MSDBD) is a plasma source that generates atmospheric-pressure plasma in an array of holes in a ceramic plate. Due to its novel geometry, the working gas flows out from the holes through the discharges, and as a consequence, a remote plasma treatment is accessible up to 5 mm from the substrate. MSDBD has been tested and verified to be efficient in surface modification of a wide range of substrates, low-temperature processing of materials, the decontamination of materials at enlarged distances, and food processing, e.g., grains, seeds, and biofilms. In this study, different physical and electrical parameters of the discharge, using various working gases, are studied to optimize the plasma properties. On the other hand, multiple parameters are investigated to understand the result of the plasma-activated working gas, which leads to calculating the concentration of hydrogen peroxide (H2O2) proportionate to the distance from the electrode. A better understanding of the behavior of the discharge in different working gases can provide more information related to the reactions carried out on the substrates' surfaces. |
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