Publication details

Dynamics of sputtered particles in multipulse HiPIMS discharge

Authors

HNILICA Jaroslav KLEIN Peter VAŠINA Petr SNYDERS Rony BRITUN Nikolay

Year of publication 2023
Type Article in Periodical
Magazine / Source Plasma Sources Science and Technology
MU Faculty or unit

Faculty of Science

Citation
Web https://doi.org/10.1088/1361-6595/acc686
Doi http://dx.doi.org/10.1088/1361-6595/acc686
Keywords sputtering; multipulse; HiPIMS; discharge; LIF; AAS
Description The behavior of the ground state neutral and singly ionized atoms is studied in multipulse high power impulse magnetron sputtering processes. The time-resolved two-dimensional laser induced fluorescence was used for imaging the discharge volume (density mapping) during the plasma-on and plasma-off time phases. The role of the number of micropulses and delay time between the micropulses in the pulse package is analyzed and discussed systematically. In addition, the propagation of the sputtered particles from the target is investigated.
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