Characterization of Composite Carbon Nitride Films Prepared by the Inductively Coupled RF Plasma

• Authors: ELIÁŠ Marek; ZAJÍČKOVÁ Lenka; BURŠÍKOVÁ Vilma; JANČA Jan; LORENC Michal
• Year of publication: 1999
• Type: Article in Proceedings
• Conference: Proceedings of 14th International Symposium on Plasma Chemistry
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Description: Characterization of Composite Carbon Nitride Films Prepared by the Inductively Coupled RF Plasma

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