Publication details
Study of Thin Film Defects by Atomic Force Microscopy
| Authors | |
|---|---|
| Year of publication | 2001 |
| Type | Article in Proceedings |
| Conference | Proceedings of the 4th Seminar on Quantitative Microscopy and 1st Seminar on Nanoscale Calibration Standards and Methods |
| MU Faculty or unit | |
| Citation | |
| Web | http://hydra.physics.muni.cz/~franta/bib/PTBF44_107.html |
| Field | Solid matter physics and magnetism |
| Keywords | AFM |
| Description | In the contribution results concerning the study of some defects of thin films will be presented. It is shown that surface defects of the upper boundaries of the films such as microroughness, microobjects and facates can be studied quantitatively. Concrete results are presented for the upper boundaries of the films formed by the following materials: HfO2, ZnSe and ZnTe. As for microroughness the values of the basic statistical quantities, i.e. the rms values of the hights, the values of the autocorrelation length and the values of the power spectral density function are presented for the film mentioned. Further, the misrepresentation concernings the results of the AFM measurements of the upper boundaries of the columnar thin films is briefly discussed. |
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