Publication details

Confidence interval for the distance of two micro/nano structures and its applications in dimensional metrology



Year of publication 2011
Type Article in Proceedings
Conference Measurement 2011, Proceedings of the 8th International Conference on Measurement
MU Faculty or unit

Faculty of Science

Field Applied statistics, operation research
Keywords Length Comparator; Dimensional Metrology; Confidence Intervals
Description We propose a method for computing an approximate (Bonferroni type) confidence interval for the distance of two micro- and/or nanostructures considered in dimensional metrology, e.g. grating lines, using data obtained by a length comparator, which allows to determine the coordinates of the edges, the position and the width of the structure from its photometric profile together with the related uncertainty contributions. The implementation is demonstrated using data obtained by the Nanometer Comparator operated at the PTB Braunschweig, Germany.
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