Publication details

Experimental study of DC driven hybrid PVD-PECVD process

Authors

SCHMIDTOVÁ Tereza SOUČEK Pavel VAŠINA Petr

Year of publication 2012
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description Evolution of basic deposition plasma parameters such as discharge voltage and current, total pressure and selected spectral emission line intensities as a function of acetylene supply flow is reported and correlated with the evolution of the state of the target.
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