Publication details
Nanopatterning of silicon nitride membranes
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Year of publication | 2016 |
Type | Conference abstract |
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Authors |
MATĚJKA Milan KRÁTKÝ Stanislav ŘIHÁČEK Tomáš KOLAŘÍK Vladimír CHLUMSKÁ Jana URBÁNEK Michal |
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Year of publication | 2016 |
Type | Conference abstract |
Citation |