Publication details

Universal dispersion model for characterization of optical thin films over wide spectral range: Application to magnesium fluoride

Authors

FRANTA Daniel NEČAS David GIGLIA Angelo FRANTA Pavel OHLÍDAL Ivan

Year of publication 2017
Type Article in Periodical
Magazine / Source Applied Surface Science
MU Faculty or unit

Faculty of Science

Citation
Web https://www.sciencedirect.com/science/article/pii/S016943321632030X
Doi http://dx.doi.org/10.1016/j.apsusc.2016.09.149
Keywords Optical constants;Ellipsometry;Spectrophotometry;Sum rule
Attached files
Description Optical characterization of magnesium fluoride thin films is performed in a wide spectral range from far infrared to extreme ultraviolet (0.01-45 eV) utilizing the universal dispersion model. Two film defects, i.e. random roughness of the upper boundaries and defect transition layer at lower boundary are taken into account. An extension of universal dispersion model consisting in expressing the excitonic contributions as linear combinations of Gaussian and truncated Lorentzian terms is introduced. The spectral dependencies of the optical constants are presented in a graphical form and by the complete set of dispersion parameters that allows generating tabulated optical constants with required range and step using a simple utility in the newAD2 software package.
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