Publication details

Large area cleaning and activation of flexible ultra-thin glass by non-thermal atmospheric-pressure plasma

Authors

SIHELNÍK Slavomír KRUMPOLEC Richard STUPAVSKÁ Monika FENG Jianyu KOSOVÁ Eva KELAR Jakub ZEMÁNEK Miroslav KOVÁČIK Dušan ČERNÁK Mirko

Year of publication 2021
Type Article in Proceedings
Conference 12th International Conference on Nanomaterials - Research & Application (NANOCON 2020)
MU Faculty or unit

Faculty of Science

Citation
Web https://doi.org/10.37904/nanocon.2020.3717
Doi http://dx.doi.org/10.37904/nanocon.2020.3717
Keywords Atmospheric plasma treatment; ultra-thin flexible glass; wetting; large-area; roll-to-roll
Description Flexible ultra-thin glass is used as a substrate or packaging material in microelectronics engineering, where the level of cleanliness determines the quality of the final product. Surface properties of glass are governed by a surface nano-layer. Besides cleaning from coarse impurities, the demand is also for nano-decontamination, where standard cleaning proves insufficient. In microelectronics and printed flexible electronics, the bonding of thin structures deposited using printed conductive inks on glass substrates is of essential importance. The non-thermal, atmospheric-pressure plasma generated by diffuse coplanar surface barrier discharge (DCSBD) was studied as an effective pre-treatment method for cleaning and activation of glass surfaces, implementable into large-scale in-line manufacturing. Two industrial adaptations of DCSBD system were applied on two types of ultra-thin flexible glass to compare the effects of plasma treatment of glass in both relaxed, and bent state. DCSBD "Air-pillow" with a planar discharge unit is designed for contactless treatment of smooth flat large-area surfaces. A roll reactor with a concavely curved DCSBD unit is intended to exemplify its integration into roll-to-roll manufacturing. The effect of plasma treatment and its stability was analyzed with water contact angle measurement and X-ray photoelectron spectroscopy. Significant wettability improvement was achieved with both applied DCSBD geometries, with better effect uniformity and durability after using the DCSBD in the planar configuration.
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