Publication details

OVĚŘENÁ TECHNOLOGIE - Průmyslová příprava TiZrN vrstev

Title in English Proven technology - Industrial deposition of TiZrN coatings


Year of publication 2021
MU Faculty or unit

Faculty of Science

Description The deposition technology of Ti_Zr_N coatings with enhanced fracture toughness is based on reactive magnetron sputtering of a rotating cylindrical target composed of titanium (Ti) and zirconium (Zr) segments.
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