Depozice a charakterizace tenkých vrstev připravených ze směsi TEOS+O2 ve vf plazmatu

• Title in English: RF plasma deposition and characterization of organosilicon thin films from TEOS + O2 gas mixture
• Authors: JANČA Jan; NAVRÁTIL Karel; BOCHNÍČEK Zdeněk
• Year of publication: 1995
• Type: Chapter of a book
• MU Faculty or unit: Faculty of Science

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