Analysis of thin films with slightly rough boundaries

• Authors: OHLÍDAL Ivan; FRANTA Daniel; HORA Jaroslav; NAVRÁTIL Karel; WEBER Jan; JANDA Pavel
• Year of publication: 1998
• Type: Article in Periodical
• Magazine / Source: Mikrochim. Acta
• MU Faculty or unit: Faculty of Science
• Web: http://hydra.physics.muni.cz/~franta/bib/MA15_177.html
• Field: Solid matter physics and magnetism
• Keywords: Spectroscopic Ellipsometry; Spectroscopic Reflectometry; Atomic Force Microscopy
• Description: In this paper presented method is based on a combination of variable angle spectroscopic ellipsometry, spectroscopic reflectometry and atomic force microscopy enabling us to determine the optical parameters and most significant statistical parameters of the rough boundaries characterizing the slightly rough single layers.

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