Publication details
Influence of Substrate and Electrode Emissivity on Plasma Enhanced CVD
| Authors | |
|---|---|
| Year of publication | 1998 |
| Type | Article in Proceedings |
| Conference | Proceeding of Thin Film Nucleation Growth and Analysis |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | PECVD |
| Description | Influence of Substrate and Electrode Emissivity on Plasma Enhanced CVD |