Deposition of CNx Films in Inductively Coupled RF Discharge

• Authors: ZAJÍČKOVÁ Lenka; ELIÁŠ Marek; BURŠÍKOVÁ Vilma; JANČA Jan; LORENC Michal
• Year of publication: 1999
• Type: Article in Proceedings
• Conference: Proceedings of ICPIG XXIV
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Description: Deposition of CNx Films in Inductively Coupled RF Discharge

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