Novel Sputter Cathode Design to Obtain Very High Ionized Flux Fraction of Deposited Material in Industrial Conditions

• Authors: UČÍK Martin; HNILICA Jaroslav; KLEIN Peter; VAŠINA Petr; KLUSOŇ Jan; JÍLEK Mojmír; ONDRYÁŠ Martin; LÜMKEMANN A
• Year of publication: 2023
• Type: Conference abstract
• MU Faculty or unit: Faculty of Science