Deposition of nanocomposite CNx/SiO films in inductively coupled r.f. discharge

• Authors: ELIÁŠ Marek; ZAJÍČKOVÁ Lenka; BURŠÍKOVÁ Vilma; JANČA Jan; LORENC Michal
• Year of publication: 2000
• Type: Article in Periodical
• Magazine / Source: Diamond and Related Materials
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: Carbon; Ellipsometry; Nitrides; Mechanical properties
• Description: Nanocomposite CNx/SiO thin films

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