Deposition of polymer films in rf discharge at atmospheric pressure

• Authors: BRABLEC Antonín; SLAVÍČEK Pavel; KAPIČKA Vratislav; KLÍMA Miloš; ELIÁŠ Marek; ŠÍCHA Miloš; SLAVINSKÁ D.; TRCHOVÁ M.; BIEDERMAN H.
• Year of publication: 2001
• Type: Article in Proceedings
• Conference: 15th ISPC symposium proceedings, vol VI
• MU Faculty or unit: Faculty of Informatics
• Field: Plasma physics
• Keywords: plasma; plasma pencil; discharge
• Description: Deposition of polymer films in rf discharge at atmospheric pressure

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