Plasmachemical nitridation of boron precursors

• Authors: ELIÁŠ Marek; KUDRLE Vít; JANČA Jan; BROŽEK Vlastimil
• Year of publication: 2002
• Type: Article in Periodical
• Magazine / Source: Czech. J. Phys.
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: boron nitride; plasma chemistry

Attached files

• 206_1.pdf
• sppt2002.zip

• Description: We carried out the plasmachemical nitridation of boron precursors

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